UHV Chamber #1 ("Victor")
This stainless-steel vessel is evacuated to a base pressure of ~ 1 x 10-10 Torr range with a magnetically-levitated 400 l/s Seiko turbomolecular pump. It is equipped a VSW 50 mm concentric-hemisphere energy analyzer, a Laybold Al/Mg dual-anode X-ray source with homemade electronics, a Phi 04-300 differentially-pumped ion source, and an Extrel mass quadrupole (0 - 800 amu) with electron-impact excitation and a Bessel box energy analyzer. The sample is mounted in a x-y-z-q on-center manipulator capable of resistive heating to up to > 1300 K and of cooling to < 90 K by using a liquid nitrogen reservoir. The temperature of the sample is measured by a thermocouple spot-welded to the side of the sample, and regulated by a homemade AC controller. A gas manifold and several leak valves are used to introduce gases into the chamber.
Techniques: TPD, XPS, LEIS, AES, SSIMS